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What are the specific uses of titanium targets as the core material for sputtering coatings made of high-purity titanium?


1、 High end electronic manufacturing

1. Semiconductor chips

Conductive layer and barrier layer: used for depositing thin films of titanium silicon compounds, titanium nitrogen compounds, etc., to prevent metal atom diffusion from contaminating the silicon substrate, ensuring the yield and performance of chips with a thickness below 0.18 μ m.

Ultra high purity requirement: 16 megabit ultra large scale integrated circuits must have a purity of ≥ 99.9999% to ensure that the thin film is free of impurity interference.

2. Display and Optical Devices

OLED electrode layer: Low resistance titanium film reduces screen power consumption and improves display panel energy efficiency.

AR/VR optical thin film: titanium aluminum composite target adjusts refractive index to generate functional coatings such as anti reflection and anti reflection.

2、 Energy technology innovation

1. Hydrogen energy storage and transportation materials

Titanium based hydrogen storage alloy: As a lightweight hydrogen storage medium, titanium iron alloy can safely adsorb hydrogen gas without the need for high-pressure/low-temperature equipment.

Two dimensional titanium based material: achieving 7.7wt% high hydrogen storage density and controllable hydrogen release at 253 ℃.

2. Photovoltaics and Nuclear Energy

Solar cells: Titanium aluminum composite targets are used for back electrode coating to improve photoelectric conversion efficiency.

Nuclear reactor cladding: Titanium zirconium alloy target coating optimizes neutron absorption performance and enhances nuclear facility safety.

3、 Bioengineering

1. Implant device coating

Antibacterial and biocompatible: Sputtering titanium film covers the surface of artificial joints and dental implants to reduce rejection reactions and infection risks.

Cardiovascular devices: used for drug delivery systems and vascular stent coating to ensure blood contact safety.

2. Imaging equipment

X-ray tube cathode: high-purity titanium target generates stable electron flow to ensure imaging accuracy.

4、 Industrial and Decorative Coating

1. Wear resistant and protective coatings

Tool Enhancement: Titanium alloy targets generate superhard coatings, extending tool life by more than three times.

Aerospace components: Titanium nickel zirconium alloy coating can withstand high temperatures of 1200 ℃ and is used for thermal barrier protection of engine blades.

2. Decorative coating

Multi color presentation: Decorative film layers such as gold and blue are prepared by magnetron sputtering and applied to high-end consumer goods and architectural glass.

5、 Breakthrough in cutting-edge fields

1. Deep space exploration materials

Extreme environment adaptation: Titanium aluminum alloy target derived coating can withstand -269 ℃ deep cold environment, ensuring the reliability of deep space detectors.

2. Flexible electronics

Flexible Circuit: Preparation of Flexible Conductive Layer with Ultra Thin Titanium Target to Support the Development of Foldable Devices.